Photonics Research, Volume. 11, Issue 10, 1694(2023)
Advanced mid-infrared plasmonic waveguides for on-chip integrated photonics
Fig. 1. (a) Cross section of the DLSPP waveguide. (b)
Fig. 2. (a) Mode effective index
Fig. 3. (a) Influence of the PE ridge geometries on the effective mode area (
Fig. 4. Schematic flow chart of the chip fabrication process, (a) using an Au hard mask and (b) using a Cr hard mask.
Fig. 5. Typical AFM image of the fabricated PE films right after spin coating. rms area roughness amounts to
Fig. 6. Scanning electron microscope (SEM) image of a DLSPP PE-waveguide structure. (a) Plasmonic waveguide and (b) Closeup of the 8 µm wide and 1 µm high PE stripe.
Fig. 7. (a) Summary of measured data in terms of waveguide losses (left) and coupling losses (right) extracted from the effective cutback method. The square points represent the losses extracted with the cutback method per each waveguide width. Dashed lines represent the exponential fit of the results obtained from the simulations. (b) Mode-profile simulations of the fabricated DLSPP waveguides, indicating their respective width (
Fig. 8. (a) SEM images of the S-bend structures (width
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Mauro David, Davide Disnan, Elena Arigliani, Anna Lardschneider, Georg Marschick, Hanh T. Hoang, Hermann Detz, Bernhard Lendl, Ulrich Schmid, Gottfried Strasser, Borislav Hinkov, "Advanced mid-infrared plasmonic waveguides for on-chip integrated photonics," Photonics Res. 11, 1694 (2023)
Category: Surface Optics and Plasmonics
Received: May. 16, 2023
Accepted: Jul. 24, 2023
Published Online: Sep. 27, 2023
The Author Email: Borislav Hinkov (borislav.hinkov@tuwien.ac.at)