Research on Emission Spectrum Diagnosis of Laser-Produced Tin Plasma Extreme Ultraviolet Source

HU Zhen-lin; WANG Tian-ze; HE Liang; LIN Nan; LENG Yu-xin; CHEN Wei-biao

doi:10.3964/j.issn.1000-0593(2025)07-1834-08

Spectroscopy and Spectral Analysis, Volume. 45, Issue 7, 1834(2025)

Research on Emission Spectrum Diagnosis of Laser-Produced Tin Plasma Extreme Ultraviolet Source

HU Zhen-lin^1,2, WANG Tian-ze^1,2, HE Liang^1,2, LIN Nan^1,2、*, LENG Yu-xin^1,2, and CHEN Wei-biao³

¹Key Laboratory of Ultra-Intense Laser Science and Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai　201800, China

²Department of Precision Optics Engineering, Shanghai Institute of Optics and Fine Mechanics, Shanghai　201800, China

³Aerospace Laser Technology and System Department, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai　201800, China

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HU Zhen-lin, WANG Tian-ze, HE Liang, LIN Nan, LENG Yu-xin, CHEN Wei-biao. Research on Emission Spectrum Diagnosis of Laser-Produced Tin Plasma Extreme Ultraviolet Source[J]. Spectroscopy and Spectral Analysis, 2025, 45(7): 1834

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Paper Information

Received: Nov. 4, 2024

Accepted: Jul. 24, 2025

Published Online: Jul. 24, 2025

The Author Email: LIN Nan (nanlin@siom.ac.cn)

DOI:10.3964/j.issn.1000-0593(2025)07-1834-08

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology