Synchrotron Radiation Research on Diffraction Efficiency of Multilayer Coated Grating

Junyao Luo; Zhi Guo; Hao Huang; Xin Ou; Xiangzhi Zhang

doi:10.3788/AOS202141.1405001

Acta Optica Sinica, Volume. 41, Issue 14, 1405001(2021)

Synchrotron Radiation Research on Diffraction Efficiency of Multilayer Coated Grating

Junyao Luo^1,2,4, Zhi Guo^1,2、*, Hao Huang^3,4,5、**, Xin Ou³, and Xiangzhi Zhang^1,2

Author Affiliations

¹Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201800, China

²Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China

³Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

⁴University of Chinese Academy of Sciences, Beijing 100049, China

⁵ShanghaiTech University, Shanghai 201210, China

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Junyao Luo, Zhi Guo, Hao Huang, Xin Ou, Xiangzhi Zhang. Synchrotron Radiation Research on Diffraction Efficiency of Multilayer Coated Grating[J]. Acta Optica Sinica, 2021, 41(14): 1405001

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Paper Information

Category: Diffraction and Gratings

Received: Jan. 18, 2021

Accepted: Feb. 22, 2021

Published Online: Jul. 11, 2021

The Author Email: Zhi Guo (guozhi@zjlab.org.cn), Hao Huang (huanghao@mail.sim.ac.cn)

DOI:10.3788/AOS202141.1405001

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