Chinese Journal of Lasers, Volume. 29, Issue s1, 197(2002)

Theoretical Model of Capacitively Coupled Radio-frequency Discharge for Ion Lasers

LAI Jian-jun1, WANG Xin-bing1, QIU Jun-lin1, and YU Jian-hua2
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(7)

    [1] [1] J. Mental, J. Reich, J. Mizeraczyk. Capacitively coupled RF excitation of CW gas laser and its comparison with hollow cathode lasers. Proc. of NATO. Gas laser-Recent development and future prospects. 1996. 55~67

    [2] [2] A. Date, K. Kitamori, Y. Sakai, et al.. Self-consistent Monte Carlo modelling of RF plasma in a helium-like model gas. J. Phys. D: Appl. Phys., 1992, 25:442~452

    [3] [3] Ε. Mateev, I. Zhelyazkov. Macroscopic model for the energy balance of an asymmetric capacitively coupled rf discharge. J. Phys. D: Appl. Phys., 1999, 32:3019~3024

    [4] [4] Μ. J. Kushner. Monte-Carlo simulation of electron properties in rf parallel plate capacitively coupled discharges. J. Appl. Phys., 1983, 54:4958~4964

    [5] [5] P. Belenguer, J. P. Boeuf. Transition betweei different regimes of rf glow discharge. Phys. Rev. A, 1990, 41: 4447-4459

    [6] [6] A. Bogaerts, M. Yan, R. Gijbels. Modeling of ionization of argon in an analytical capacitively coupled radio-frequency glow discharge. J. Appl. Phys., 1999, 86:2990~3001

    [7] [7] F. F. Young, C. H. Wu. A comparative study between non-equilibrium and equilibrium models of RF glow discharges. J. Phys. D: Appl. Phys., 1993, 25:782~792

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    LAI Jian-jun, WANG Xin-bing, QIU Jun-lin, YU Jian-hua. Theoretical Model of Capacitively Coupled Radio-frequency Discharge for Ion Lasers[J]. Chinese Journal of Lasers, 2002, 29(s1): 197

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    Paper Information

    Category: laser devices and laser physics

    Received: --

    Accepted: --

    Published Online: Feb. 23, 2013

    The Author Email:

    DOI:

    CSTR:32186.14.

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