APPLIED LASER, Volume. 41, Issue 5, 974(2021)

Experimental Research on Monocrystalline Silicon Etching by Using UV Laser

Gao Yongqiang1、* and Shi Xinglong2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    References(4)

    [10] [10] REN J,ORLOV S S,HESSELINK L,et al.Nanosecond laser siliconmicromachining[C]//Proceedings of the SPIE,Vol5339,Bellingham,WA,USA:[s.n.],2004:382-393.

    [13] [13] KODAMA R, NORREYS P A, MIMA K, et al. Fast heating of ultrahigh-density plasma as a step towards laser fusion ignition[J]. Nature, 2001, 412(6849): 798-802.

    [14] [14] ANISIMOV S I, KHOKHLOV V A. Instabilities in laser-matter interaction[M]. Boca Raton: CRC Press, 1995.

    Tools

    Get Citation

    Copy Citation Text

    Gao Yongqiang, Shi Xinglong. Experimental Research on Monocrystalline Silicon Etching by Using UV Laser[J]. APPLIED LASER, 2021, 41(5): 974

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Nov. 9, 2020

    Accepted: --

    Published Online: Jan. 17, 2022

    The Author Email: Yongqiang Gao (wersan@163.com)

    DOI:10.14128/j.cnki.al.20214105.974

    Topics