Photonics Research, Volume. 13, Issue 6, 1526(2025)

All-fiber-optic mass sensor based on optomechanical nanofilm resonators

Qiao Lin1, Xin Ding1, Weiguan Zhang2, Yueliang Xiao1, Mingxiu Wang1, Jingyi Hou1, Congmin Li1, Chenxu Li1, Changrui Liao1,3, Yiping Wang1,2, and Shen Liu1、*
Author Affiliations
  • 1Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University, Shenzhen 518060, China
  • 2Guangdong Laboratory of Artificial Intelligence and Digital Economy (SZ), Shenzhen 518107, China
  • 3Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
  • show less
    Figures & Tables(8)
    (a) The scheme of the optomechanical mass sensor. (b) The scheme of analytes acting on graphene membrane. (c) Detection of mass-induced tension increases by monitoring the resonant frequency of the optomechanical resonator.
    (a) Raman spectrum from the suspended multilayer graphene film measured by a 532 nm laser. The inset shows the SEM image of the resonator before etching. (b) The side view of the open optical cavity at the fiber end face under the microscope. (c) The SEM image of the trampoline-type resonant structure covering the fiber end facet.
    Experimental setup. (a) The optical excitation and detection system used to monitor the response of the fiber tip resonator to change in Au mass. (b) The apparatus used to acquire optical reflection spectra. EOM, electro-optic modular; VNA, vector network analyzer; PD, photodetector; BBS, broadband light source; OSA, optical-spectrum analyzer. (c) The reflection spectrum of trampoline-type graphene film resonator. (d) The device of the mass source supplied by the Au target.
    (a) Mechanical frequency characteristics of the sensor. Insets: the simulation of the first and second order modes of the resonator obtained through finite element method. (b), (c) Amplitude versus frequency plot of the resonator. The dotted lines are Lorentz fitting of two resonance peaks in linear coordinates.
    Mass sensing results. (a) Frequency characteristics of the first and second order modes of the resonator as functions of time in response to increasing masses during the sputtering process. (b), (c) Plotted results of peak searching of (a), showing shifts of resonant frequencies and variation of amplitude at these two frequencies, respectively.
    (a) The diagram of the silicon wafer used to measure the thickness of the added Au film. (b) The calibration result of the thickness of Au film measured using atomic force microscopy (AFM).
    Shifts of resonant frequencies in response to increasing masses in comparison with predictions of the simulation model. k1, k1′, k2, k2′ represent the slope of linear fits. R2 denotes the linearity of the fitting result.
    Experimental assessments of frequency stability. (a) Frequency stability before testing. (b) Frequency stability after testing.
    Tools

    Get Citation

    Copy Citation Text

    Qiao Lin, Xin Ding, Weiguan Zhang, Yueliang Xiao, Mingxiu Wang, Jingyi Hou, Congmin Li, Chenxu Li, Changrui Liao, Yiping Wang, Shen Liu, "All-fiber-optic mass sensor based on optomechanical nanofilm resonators," Photonics Res. 13, 1526 (2025)

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Optical Devices

    Received: Nov. 4, 2024

    Accepted: Mar. 19, 2025

    Published Online: May. 26, 2025

    The Author Email: Shen Liu (shenliu@szu.edu.cn)

    DOI:10.1364/PRJ.546219

    CSTR:32188.14.PRJ.546219

    Topics