Microelectronics, Volume. 52, Issue 4, 663(2022)
3-D Equivalent Circuit Model of MEMS Microwave Power Sensors
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YU Wenting, TANG Shuting, XIN Zehui, WANG Debo. 3-D Equivalent Circuit Model of MEMS Microwave Power Sensors[J]. Microelectronics, 2022, 52(4): 663
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Received: Oct. 14, 2021
Accepted: --
Published Online: Jan. 18, 2023
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