Coordinate unification and data fusion for composite measurement with contact and white light interferometric probes

Zhenying CHENG; Dongjian XU; Chengyao ZHANG; Yunlong LIU; Ruijun LI

doi:10.37188/OPE.20243217.2698

Optics and Precision Engineering, Volume. 32, Issue 17, 2698(2024)

Coordinate unification and data fusion for composite measurement with contact and white light interferometric probes

Zhenying CHENG, Dongjian XU, Chengyao ZHANG, Yunlong LIU, and Ruijun LI^*

Anhui Provincial Key Laboratory of Measurement Theory and Precision Instruments， School of Instrument Science and Opto-electronics Engineering， Hefei University of Technology， Hefei230009， China

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Figures & Tables(15)

Fig. 1. Schematic diagram for coordinate unification of contact and white light interferometric probes

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Fig. 2. Schematic diagram of calibrator

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Fig. 3. Flowchart for coordinate unification

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Fig. 4. Scheme of coordinate system transformation

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Fig. 5. Schematic diagram of spatial error ellipsoid

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Fig. 6. Physical photograph of calibrator

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Fig. 7. Experimental setup for contact probe measurement and WLI probe measurement

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Fig. 8. WLI scanning calibration hole data before and after filtering

Fig. 9. [in Chinese]

Table 1. Simulation results for coordinate unification error
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Table 1. Simulation results for coordinate unification error
Reference
point error
RMSE
Mean value Standard deviation
0.87 0.30 0.03
1.73 0.62 0.04
2.60 0.94 0.07
3.46 1.19 0.09

Table 2. Parameter indicators of measuring instrument

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Table 2. Parameter indicators of measuring instrument

Measuring equipment	Measuring range	Lateral resolution	Axial resolution	Repetition
Micro-nanometric CMM	20 mm×20 mm×10 mm	1 nm	1 nm	20 nm
White-light interferometer	0.83 mm×0.83 mm×100 μm	0.35 μm	0.01 nm	0.03 nm

Table 3. Reference point coordinate values and their standard deviations for contact probe

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Table 3. Reference point coordinate values and their standard deviations for contact probe

Serial number	Reference point coordinates			Coordinate fit standard deviation
Serial number	X	Y	Z	$σ_{X}$	$σ_{Y}$	$σ_{Z}$
1	-12.496	0.674	-304.783	0.036	0.045	0.081
2	-2 516.442	-15.390	-304.232	0.029	0.031	0.086
3	-5 019.180	-25.701	-303.896	0.046	0.058	0.096
4	-5 037.824	2 483.494	-301.455	0.078	0.069	0.116
5	-40.856	2 515.145	-302.141	0.054	0.044	0.101
6	-60.129	5 007.533	-299.679	0.047	0.032	0.097
7	-2 563.800	4 990.515	-298.652	0.053	0.051	0.088
8	-5 063.001	4 979.432	-297.724	0.064	0.057	0.093
Mean of standard deviation				0.051	0.048	0.095

Table 4. Reference point coordinate values and their standard deviations for white light interferometric probe

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Table 4. Reference point coordinate values and their standard deviations for white light interferometric probe

Serial number	Reference point coordinates			Coordinate fit standard deviation
Serial number	X	Y	Z	$σ_{X}$	$σ_{Y}$	$σ_{Z}$
1	56 887.944	22 364.079	4 630.804	0.516	0.617	0.070
2	54 385.116	22 389.236	4 631.281	0.515	0.550	0.076
3	51 883.093	22 413.602	4 631.839	0.308	0.616	0.105
4	51 901.004	24 923.604	4 634.023	0.586	0.455	0.104
5	56 902.172	24 877.844	4 633.327	0.335	0.471	0.095
6	56 919.842	27 369.445	4 635.912	0.291	0.487	0.062
7	54 416.628	27 394.744	4 636.862	0.202	0.360	0.065
8	51 917.543	27 420.477	4 637.753	0.317	0.296	0.031
Mean of standard deviation				0.384	0.482	0.076

Table 5. Accuracy of system scale calibration
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Table 5. Accuracy of system scale calibration
Precision RMSE X-component Y-component Z-component
Value 1.889 1.199 1.457 0.076

Table 6. Flatness obtained using traditional and improved weighted least squares methods
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Table 6. Flatness obtained using traditional and improved weighted least squares methods
组传统方法改进方法
1 246 188
2 171 151
3 317 263
4 295 249
5 156 212
6 335 271
Relative error 27% 11%
Standard deviation 69 43

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Zhenying CHENG, Dongjian XU, Chengyao ZHANG, Yunlong LIU, Ruijun LI. Coordinate unification and data fusion for composite measurement with contact and white light interferometric probes[J]. Optics and Precision Engineering, 2024, 32(17): 2698

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Paper Information

Category: Precision Measurement and Sensing

Received: May. 10, 2024

Accepted: --

Published Online: Nov. 18, 2024

The Author Email: Ruijun LI (rj-li@hfut.edu.cn)

DOI:10.37188/OPE.20243217.2698

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Simulation results for coordinate unification error

Table 1. Simulation results for coordinate unification error

Table 2. Parameter indicators of measuring instrument

Table 2. Parameter indicators of measuring instrument

Table 3. Reference point coordinate values and their standard deviations for contact probe

Table 3. Reference point coordinate values and their standard deviations for contact probe

Table 4. Reference point coordinate values and their standard deviations for white light interferometric probe

Table 4. Reference point coordinate values and their standard deviations for white light interferometric probe

Table 5. Accuracy of system scale calibration

Table 5. Accuracy of system scale calibration

Table 6. Flatness obtained using traditional and improved weighted least squares methods

Table 6. Flatness obtained using traditional and improved weighted least squares methods