Laser & Optoelectronics Progress, Volume. 60, Issue 5, 0531003(2023)
Development of Longwave Infrared Antireflective Coating Based on As40Se60 Chalcogenide Glass
Figures & Tables(10)
Fig. 1. Schematic of films layer structure. (a) Film residual stress; (b) film layer structure
Fig. 2. Transmittance curves. (a) Transmittance curves after plating YbF3 coating; (b) transmittance design curves of coating 1 and coating 3
Fig. 4. Substrate surface shape change before and after deposition connection layer. (a) (b) Assist deposition without ion; (c) (d) assist deposition with ion
Fig. 5. Substrate surface shape before deposition coating. (a) Assist deposition without ion; (b) assist deposition with ion; (c) (d) deposited coating without ion on both surface
Fig. 7. Transmittance and reflectance curves of actual test. (a) Transmittance before and after coating deposition; (b) transmittance before and after durability test；（c）reflectance
Table 1. Physical performance parameters of each material
View tableTable 1. Physical performance parameters of each material
Material Transparency range /μm Refractive index（at 8 μm） Coefficient of thermal expansion /（10-6 K-1） Young’s modulus /GPa Poisson ratio Type of stress As40Se60［ 2 ］1-14 2.78 20.7 18.5 0.30 — Ge［ 13 ］0.7-23 4.01 6.1 103.0 0.28 Compressive stress ZnS［ 14 ］0.4-15 2.21 7.0 77.0 0.29 Compressive stress ZnSe［ 14 ］0.6-15 2.41 7.8 67.0 0.28 Compressive stress YbF3 0.22-14［ 15 ］1.36［ 15 ］16.3［ 16 ］76.0［ 8 ］0.28［ 8 ］Tensile stress
Table 2. Film deposition process parameters
View tableTable 2. Film deposition process parameters
Substrate Deposition temperature /℃ Degree of vacuum /Pa Deposition rate /（nm·s-1） Ion assist Ge ZnS YbF3 As40Se60 130 1×10-4 0.6 1.2 1.0 Yes
Table 3. Stability experiments of ZnS coating
View tableTable 3. Stability experiments of ZnS coating
Serial number×times Deposition temperature /℃ Adhesion strength 1×3 90 ★ 2×3 100 ★★ 3×3 110 ★★☆ 4×3 120 ★★ 5×3 130 ★★
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Zhuo Liu, Youliang Zhang, Gang Li, Weisheng Yang, Xueying Wang, Qiming Xie, Xiaojing Yang. Development of Longwave Infrared Antireflective Coating Based on As40Se60 Chalcogenide Glass[J]. Laser & Optoelectronics Progress, 2023, 60(5): 0531003
Paper Information
Category: Thin Films
Received: Jan. 14, 2022
Accepted: Feb. 28, 2022
Published Online: Mar. 16, 2023
The Author Email: Weisheng Yang (ywsh2007@126.com), Qiming Xie (646010668@qq.com), Xiaojing Yang (xjyang@vip.sina.com)
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