Fig. 1. Schematic of new type iron-doped buried SAG-DSAL-EML

Fig. 2. Schematic of the active region structure

Fig. 3. PI characteristics at different well numbers

Fig. 4. SMSR and average gain at different well numbers

Fig. 5. Characteristics of lasers at different quantum well thicknesses

Fig. 6. Laser wavelength

Fig. 7. Laser wavelength

Fig. 8. Laser partial waveguide structure of iron-doped buried EML

Fig. 9. The cross-sectional optical field distribution of the laser part of the EML

Fig. 10. Manufacturing process flow chart of SAG-DSAL-EML

Fig. 11. Mask growth pattern of SAG

Fig. 12. Microscopic image of iron-doped buried structure

Fig. 13. EML sample chip

Fig. 14. Comparison of PI characteristics between SAG-DSAL structure and traditional multiple quantum well structure

Fig. 15. Comparison chart of horizontal light field mode

Fig. 16. Laser far-field distribution

Fig. 17. 17　S parameters of HFSS simulation modulator

Fig. 18. Equivalent circuit diagram of modulator

Fig. 19. 19　S -parameter fitting image

Fig. 20. Fequency response of modulator under different junction capacitance

Fig. 21. Threshold value characteristics

Fig. 22. The laser spectrum of the part of laser at 70 mA injection current

Fig. 23. Measured static extinction ratio

Fig. 24. High frequency response curve