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Photonics Research, Volume. 6, Issue 9, 925(2018)

High-Q germanium optical nanocavity

Ting-Hui Xiao1、†, Ziqiang Zhao2、†, Wen Zhou3、†, Mitsuru Takenaka2, Hon Ki Tsang3, Zhenzhou Cheng1、*, and Keisuke Goda1,4,5
Author Affiliations
  • 1Department of Chemistry, The University of Tokyo, Tokyo 113-0033, Japan
  • 2Department of Electrical Engineering and Information Systems, The University of Tokyo, Tokyo 113-0033, Japan
  • 3Department of Electronic Engineering, The Chinese University of Hong Kong, Shatin, Hong Kong SAR, China
  • 4Department of Electrical Engineering, University of California, Los Angeles, California 90095, USA
  • 5e-mail: goda@chem.s.u-tokyo.ac.jp
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    Schematic of the monolithically integrated on-chip MIR germanium device that contains a high-Q nanocavity, two suspended-membrane waveguides, and two focusing subwavelength grating couplers. The inset to the bottom left shows the design of the high-Q nanocavity. The inset to the bottom right shows a cross-sectional view of a suspended-membrane waveguide.

    Fig. 1. Schematic of the monolithically integrated on-chip MIR germanium device that contains a high-Q nanocavity, two suspended-membrane waveguides, and two focusing subwavelength grating couplers. The inset to the bottom left shows the design of the high-Q nanocavity. The inset to the bottom right shows a cross-sectional view of a suspended-membrane waveguide.

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    SEM images of the MIR germanium device, including the high-Q nanocavity. (a) Top view of the device. Scale bar: 10 μm. (b) Top view of the high-Q nanocavity. Scale bar: 500 nm.

    Fig. 2. SEM images of the MIR germanium device, including the high-Q nanocavity. (a) Top view of the device. Scale bar: 10 μm. (b) Top view of the high-Q nanocavity. Scale bar: 500 nm.

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    Experimental characterization of the MIR germanium device, including the high-Q nanocavity. (a) Measured transmission spectrum of the device (blue) and measured coupling efficiency of the focusing subwavelength grating couplers (red). (b) Lorentzian fitting of the measured nanocavity resonant mode. The inset shows the electric field magnitude distribution of the resonant mode.

    Fig. 3. Experimental characterization of the MIR germanium device, including the high-Q nanocavity. (a) Measured transmission spectrum of the device (blue) and measured coupling efficiency of the focusing subwavelength grating couplers (red). (b) Lorentzian fitting of the measured nanocavity resonant mode. The inset shows the electric field magnitude distribution of the resonant mode.

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    • Table 1. Comparison of MIR Germanium Cavities

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      Table 1. Comparison of MIR Germanium Cavities

      GeometryWavelengthQ FactorCavity TypeReference
      Photonic crystal cavity2.5 μm∼18,000NanocavityThis work
      Photonic crystal cavity2.3 μm∼200Nanocavity[24]
      Racetrack microring5.3 μm∼20,000Microcavity[20]
      Racetrack microring3.8 μm∼5000Microcavity[28]
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    Ting-Hui Xiao, Ziqiang Zhao, Wen Zhou, Mitsuru Takenaka, Hon Ki Tsang, Zhenzhou Cheng, Keisuke Goda, "High-Q germanium optical nanocavity," Photonics Res. 6, 925 (2018)

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    Paper Information

    Category: Integrated Optics

    Received: Apr. 23, 2018

    Accepted: Jul. 16, 2018

    Published Online: Sep. 5, 2018

    The Author Email: Zhenzhou Cheng (zzcheng@chem.s.u-tokyo.ac.jp)

    DOI:10.1364/PRJ.6.000925

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology