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International Journal of Extreme Manufacturing, Volume. 2, Issue 3, 32006(2020)

Directed self-assembly of block copolymers for sub-10 nm fabrication

Yu Chen and Shisheng Xiong*
Author Affiliations
  • School of Information Science and Technology, Fudan University, Shanghai, People’s Republic of China
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    Yu Chen, Shisheng Xiong. Directed self-assembly of block copolymers for sub-10 nm fabrication[J]. International Journal of Extreme Manufacturing, 2020, 2(3): 32006

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    Paper Information

    Category: Topical Review

    Received: Mar. 2, 2020

    Accepted: --

    Published Online: Jan. 28, 2021

    The Author Email: Shisheng Xiong (sxiong@fudan.edu.cn)

    DOI:10.1088/2631-7990/aba3ae

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology