OPTICS & OPTOELECTRONIC TECHNOLOGY, Volume. 20, Issue 3, 77(2022)

Study on Contamination Deposition Characteristics of Ultra-Smooth Optical Component Surface in Vacuum Environment

BAO Lang, LI Ding, CHE Chi-cheng, Li Qian-tao, WANG Qiang, GUO Yan-long, and WANG Bao-feng
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    References(3)

    [3] [3] MATTHEWS M J, SHEN N, HONIG J, et al. Phase modulation and morphological evolution associated with surface-bound particle ablation[J]. Journal of the Optical Society of America, 2013, B30 (12): 3233-3242.

    [4] [4] ASHE B, GIACOFEI C, MYHRE G, et al. Optimizing a cleaning process for multilayer-dielectric-(MLD) diffraction grating[C]. SPIE, 2008, 6720: 67200N.

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    BAO Lang, LI Ding, CHE Chi-cheng, Li Qian-tao, WANG Qiang, GUO Yan-long, WANG Bao-feng. Study on Contamination Deposition Characteristics of Ultra-Smooth Optical Component Surface in Vacuum Environment[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2022, 20(3): 77

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    Paper Information

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    Received: Jan. 10, 2022

    Accepted: --

    Published Online: Aug. 3, 2022

    The Author Email:

    DOI:

    CSTR:32186.14.

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