Acta Optica Sinica, Volume. 34, Issue 3, 312001(2014)
A Phase Extraction Algorithm in Wavelength Tuning Interferometry
[1] [1] de Groot P. Measurement of transparent plates with wavelength-tuned phase-shifting interferometry [J]. Appl Opt, 2000, 39(16): 2658-2663.
[2] [2] J Burke, K Hibino, R Hanayama, et al.. Simultaneous measurement of several near-parallel surfaces with wavelength-shifting interferometry and a tunable phase-shifting method [J]. Opt & Lasers in Eng, 2007, 45(2): 326-341.
[3] [3] K Hibino, R Hanayama, J Burke, et al.. Tunable phase-extraction formulae for simultaneous shape measurement of multiple surfaces with wavelength-shifting interferometry [J]. Opt Express, 2004, 12(23): 5579-5594.
[4] [4] K Hibino, J Burke, B F Oreb. Measurement of surface figure and optical thickness variation of a thin parallel plate in wavelength-scanned interferometry with minimized laser tuning range [C]. SPIE, 2004, 5180: 421-428.
[5] [5] Jan Burke, Kenichi Hibino, Ryohei Hanayama, et al.. Interferometric measurement of optical thickness variation of a multiple-surface object by a wavelength tuning interferometer [C]. SPIE, 2004, 6024: 60240O.
[6] [6] Li Wenzhe. Phase Calibration Method of Wavelength-Shifting Interferometry [D]. Nanjing: Nanjing University of Science and Technology, 2009.
[10] [10] Zhang Min, Tang Feng, Wang Xiangchao, et al.. Phase retrieval errors analysis of interferogram using two dimensional fast Fourier transform method [J]. Chinese J Lasers, 2013, 40(3): 0308002.
[11] [11] Yang Mu. The Research on the Wavelength-Tuned Phase-Shifting Interferometry with Long Cavity [D]. Nanjing: Nanjing University of Science and Technology, 2012.
[12] [12] Guo Renhui, Li Jianxin, Zhu Rihong, et al.. Research on the randomly phase shifting algorithm with wavelength tuning [J]. Chinese J Lasers, 2012, 39(5): 0508002.
[13] [13] Guo Renhui, Li Jianxin, Zhu Rihong, et al.. An adaptive phase selecting method of wavelength tuning at long interference cavity length [J]. Acta Optica Sinica, 2013, 33(1): 0112004.
[14] [14] I B Kong, S W Kim. General algorithm of phase-shifting interferometry by iterative least-squares fitting [J]. Opt Eng, 1995, 34(1): 183-188.
Get Citation
Copy Citation Text
Liu Jian, Tian Ailing, Liu Bingcai, Wang Hongjun. A Phase Extraction Algorithm in Wavelength Tuning Interferometry[J]. Acta Optica Sinica, 2014, 34(3): 312001
Category: Instrumentation, Measurement and Metrology
Received: Aug. 15, 2013
Accepted: --
Published Online: Feb. 28, 2014
The Author Email: Jian Liu (liujianxiuzi0011@126.com)