Microelectronics, Volume. 52, Issue 6, 1071(2022)
Optimization Design of Thermoelectric MEMS Microwave Power Sensor
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[in Chinese], [in Chinese], [in Chinese]. Optimization Design of Thermoelectric MEMS Microwave Power Sensor[J]. Microelectronics, 2022, 52(6): 1071
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Received: Apr. 9, 2022
Accepted: --
Published Online: Mar. 11, 2023
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