Fig. 1. (a) Metamaterial antireflection coating structure; (b) basic structural unit

Fig. 2. (a) Transmissivity and reflectivity of antireflection coating and bare silicon; (b) interference model of antireflection coating

Fig. 3. (a) Reflectivity curves under different distances between two SRRs; (b) relationship between band width and SRR distance

Fig. 4. Electric field distributions at frequency of (a) 1.48 THz and (b) 1.72 THz

Fig. 5. (a) Reflectivity under different d; (b) relationship between band width and d

Fig. 6. (a) Single SRR with stand-up structure; (b) reflectivity; (c) transmissivity