Two-Dimensional Grating Fabrication Based on Ultra-Precision Laser Direct Writing System

Minkang Li; Xiansong Xiang; Changhe Zhou; Chunlong Wei; Wei Jia; Changcheng Xiang; Yunkai Lu; Shiyao Zhu

doi:10.3788/AOS201939.0905001

Acta Optica Sinica, Volume. 39, Issue 9, 0905001(2019)

Two-Dimensional Grating Fabrication Based on Ultra-Precision Laser Direct Writing System

Minkang Li^1,2, Xiansong Xiang^1,2, Changhe Zhou^1,2、*, Chunlong Wei¹, Wei Jia³, Changcheng Xiang³, Yunkai Lu^1,2, and Shiyao Zhu^1,2

Author Affiliations

¹ Laboratory of Information Optics and Optoelectronics Techniques, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

² Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³ Institute of Photonics Technology, Jinan University, Guangzhou, Guangdong 511443, China

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Minkang Li, Xiansong Xiang, Changhe Zhou, Chunlong Wei, Wei Jia, Changcheng Xiang, Yunkai Lu, Shiyao Zhu. Two-Dimensional Grating Fabrication Based on Ultra-Precision Laser Direct Writing System[J]. Acta Optica Sinica, 2019, 39(9): 0905001

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Paper Information

Category: Diffraction and Gratings

Received: Apr. 16, 2019

Accepted: May. 20, 2019

Published Online: Sep. 9, 2019

The Author Email: Changhe Zhou (chazhou@mail.shcnc.ac.cn)

DOI:10.3788/AOS201939.0905001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology