Mo/Si aperiodic multilayer broadband reflective mirror for 12.5–28.5-nm wavelength range

Moyan Tan; Haochuan Li; Qiushi Huang; Hongjun Zhou; Tonglin Huo; Xiaoqiang Wang; Jingtao Zhu

doi:10.3788/COL201109.023102

Chinese Optics Letters, Volume. 9, Issue 2, 023102(2011)

Mo/Si aperiodic multilayer broadband reflective mirror for 12.5–28.5-nm wavelength range

Moyan Tan¹, Haochuan Li¹, Qiushi Huang¹, Hongjun Zhou², Tonglin Huo², Xiaoqiang Wang¹, and Jingtao Zhu¹

¹Shanghai Key Laboratory of Special Artificial Microstructure Materials and Technology, Institute of Precision Optical Engineering, Physics Department, Tongji University, Shanghai 200092, China

²National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China

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Moyan Tan, Haochuan Li, Qiushi Huang, Hongjun Zhou, Tonglin Huo, Xiaoqiang Wang, Jingtao Zhu, "Mo/Si aperiodic multilayer broadband reflective mirror for 12.5–28.5-nm wavelength range," Chin. Opt. Lett. 9, 023102 (2011)

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Paper Information

Received: May. 28, 2010

Accepted: Oct. 21, 2010

Published Online: Mar. 3, 2011

The Author Email:

DOI:10.3788/COL201109.023102

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology