Chinese Optics Letters, Volume. 9, Issue 2, 023102(2011)
Mo/Si aperiodic multilayer broadband reflective mirror for 12.5–28.5-nm wavelength range
Aperiodic molybdenum/silicon (Mo/Si) multilayer designed as a broadband reflective mirror with mean reflectivity of 10% over a wide wavelength range of 12.5–28.5 nm at incidence angle of 5? is developed using a numerical optimized method. The multilayer is prepared using direct current magnetron sputtering technology. The reflectivity is measured using synchrotron radiation. The measured mean reflectivity is 7.0% in the design wavelength range of 12.5–28.5 nm. This multilayer broadband reflective mirror can be used in extreme ultraviolet measurements and will greatly simplify the experimental arrangements.
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Moyan Tan, Haochuan Li, Qiushi Huang, Hongjun Zhou, Tonglin Huo, Xiaoqiang Wang, Jingtao Zhu, "Mo/Si aperiodic multilayer broadband reflective mirror for 12.5–28.5-nm wavelength range," Chin. Opt. Lett. 9, 023102 (2011)
Received: May. 28, 2010
Accepted: Oct. 21, 2010
Published Online: Mar. 3, 2011
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