Characterization of Micro-Scratches on 4H-SiC Substrates by KCl Solution Crystallization-Assisted Method

ZHANG Chitengfei; ZHANG Song; GONG Ruocheng; YANG Junwei; SONG Huaping

Journal of Synthetic Crystals, Volume. 53, Issue 10, 1745(2024)

ZHANG Chitengfei¹, ZHANG Song², GONG Ruocheng³, YANG Junwei^3,4, and SONG Huaping^3,4、*

¹Hubei Longzhong Laboratory, Xiangyang 441000, China

²State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China

³Songshan Lake Materials Laboratory, Dongguan 523808, China

⁴PowerEpi Semiconductor Co., Ltd., Dongguan 523786, China

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ZHANG Chitengfei, ZHANG Song, GONG Ruocheng, YANG Junwei, SONG Huaping. Characterization of Micro-Scratches on 4H-SiC Substrates by KCl Solution Crystallization-Assisted Method[J]. Journal of Synthetic Crystals, 2024, 53(10): 1745

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Paper Information

Category:

Received: May. 28, 2024

Accepted: Jan. 17, 2025

Published Online: Jan. 17, 2025

The Author Email: SONG Huaping (songhp211@163.com)

DOI:

CSTR:32186.14.

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology