Microelectronics, Volume. 51, Issue 4, 587(2021)

A New PMTSCR Device with Low Trigger Voltage for Electrostatic Discharge Protection

LIAO Changjun1, HUANG Qiupei2, HE Minghao2, WANG Xin2, ZHENG Tongwen2, and LIU Jizhi2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    A new PMOS device trigger SCR device (PMTSCR) was proposed to reduce the trigger voltage for electrostatic discharge (ESD) protection. The turn-on of the PMTSCR device was determined by the channel length of the parasitic PMOS and the parasitic well resistances RPW and RNW of the SCR device. The device featured low trigger voltage. The experimental results showed that the trigger voltage of the PMTSCR device reduced from 63 V to 44 V, and was 30% less than that of the traditional low voltage trigger SCR device (LVTSCR), while the ESD leakage current of the device remained unchanged.

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    LIAO Changjun, HUANG Qiupei, HE Minghao, WANG Xin, ZHENG Tongwen, LIU Jizhi. A New PMTSCR Device with Low Trigger Voltage for Electrostatic Discharge Protection[J]. Microelectronics, 2021, 51(4): 587

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    Paper Information

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    Received: Nov. 24, 2020

    Accepted: --

    Published Online: Feb. 21, 2022

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.200542

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