Laser & Optoelectronics Progress, Volume. 60, Issue 19, 1923001(2023)
Large Range and High-Sensitivity Pressure Sensor Based on Integrated Mach-Zehnder Interference
Figures & Tables(11)
Fig. 4. Theoretical calculation diagram of output spectra of AMZI pressure sensor
Table 1. AMZI parameters
View tableTable 1. AMZI parameters
Parameter Value lw /mm 12 Contact area /mm2 63.9 m 78 ΔL /μm 82.68 l1 /μm 22000.00 l2 /μm 22082.68 Waveguide cross-section /（μm×μm） 4×4 Core/cladding index 1.47459/1.4448 ne（@1550 nm） 1.4622 MMI length /μm 519.80 MMI width /μm 30.00
Table 2. Summary of research on large range optical pressure sensors by different technical routes
View tableTable 2. Summary of research on large range optical pressure sensors by different technical routes
Sensor Measurement range /MPa Integrated optics Sensor in Ref. ［ 10 ］71 No Sensor in Ref. ［ 11 ］42 Sensor in Ref. ［ 15 ］7 Sensor in Ref. ［ 7 ］10 Sensor in Ref. ［ 8 ］40 Yes Sensor in Ref. ［ 9 ］80 This work 110 SBE 911Plus（Seabird） 69 High end commercial products based on electrical principle
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Nan Zhang, Rui Yin. Large Range and High-Sensitivity Pressure Sensor Based on Integrated Mach-Zehnder Interference[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1923001
Paper Information
Category: Optical Devices
Received: Mar. 28, 2022
Accepted: Jun. 17, 2022
Published Online: Sep. 28, 2023
The Author Email: Nan Zhang (znan@sdu.edu.cn)
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