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Acta Optica Sinica, Volume. 41, Issue 19, 1905001(2021)

Effect of Phase Grating Asymmetry on Position Measurement Accuracy

Guanghua Yang1,2, Yu Wang1,2, Jing Li1,2、*, Minxia Ding1, and Zengxiong Lu1,2
Author Affiliations
  • 1Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    Article index updated: Mar. 10, 2025

    The article is cited by 4 article(s) CLP online library. (Some content might be in Chinese.)
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    Guanghua Yang, Yu Wang, Jing Li, Minxia Ding, Zengxiong Lu. Effect of Phase Grating Asymmetry on Position Measurement Accuracy[J]. Acta Optica Sinica, 2021, 41(19): 1905001

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    Paper Information

    Category: Diffraction and Gratings

    Received: Jan. 25, 2021

    Accepted: Apr. 23, 2021

    Published Online: Oct. 9, 2021

    The Author Email: Li Jing (lijing2018@ime.ac.cn)

    DOI:10.3788/AOS202141.1905001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology