Piezoelectrics & Acoustooptics, Volume. 47, Issue 1, 113(2025)

Impact Analysis of Integrating Helmholtz Resonators into PMUTs on Ranging Performance

LIU Haojie1...2,3, TA Guifeng1,2,3, YAO Shutao1,2,3, LI Jiadong1,2,3, MIAO Bin2,3, SHANG Wenling2,3,4, FENG Changkun2,3, and TAO Jinyan2,35 |Show fewer author(s)
Author Affiliations
  • 1School of Mechanical and Electrical Engineering, Changchun University of Science and Technology, Changchun 130012, China
  • 2Suzhou Institute of Nano-Tech and Nano-Bionics(SINANO), Chinese Academy of Sciences, Suzhou 215123, China
  • 3Key Laboratory of Multifunctional Nanomaterials and Smart Systems, Chinese Academy of Sciences, Suzhou 215123, China
  • 4School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026, China
  • 5The College of Science, Shanghai University, Shanghai 200072, China
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    References(13)

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    [4] [4] PRZYBYLA R, FLYNN A, JAIN V, et al. A micromechanical ultrasonic distance sensor with >1 meter range[C]∥Beijing, China:2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, 2011: 2070-2073.

    [5] [5] CHIU Y, WANG Chen, GONG Dan, et al. A novel ultrasonic TOF ranging system using AlN based PMUTs[J]. Micromachines, 2021, 12(3): 284.

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    [9] [9] XU Tingzhong, ZHAO Libo, JIANG Zhuangde, et al. Equivalent circuit models of cell and array for resonant cavity-based piezoelectric micromachined ultrasonic transducer[J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2020, 67(10): 2103-2118.

    [11] [11] TOYMUS A T, BATHAEI M J, AKINCI S, et al. Design and fabrication of a P(VDF-TrFE) based piezoelectric micromachined ultrasonic transducer with acoustic cavity[C]∥Venice, Italy:2022 IEEE International Ultrasonics Symposium (IUS), 2022: 1-3.

    [12] [12] FENG Guohua, CHEN Wensheng. Piezoelectric micromachined ultrasonic transducer-integrated Helmholtz resonator with microliter-sized volume-tunable cavity[J]. Sensors, 2022, 22(19): 7471.

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    LIU Haojie, TA Guifeng, YAO Shutao, LI Jiadong, MIAO Bin, SHANG Wenling, FENG Changkun, TAO Jinyan. Impact Analysis of Integrating Helmholtz Resonators into PMUTs on Ranging Performance[J]. Piezoelectrics & Acoustooptics, 2025, 47(1): 113

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    Paper Information

    Received: Sep. 10, 2024

    Accepted: Apr. 17, 2025

    Published Online: Apr. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.01.019

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