Piezoelectrics & Acoustooptics, Volume. 47, Issue 1, 113(2025)

Impact Analysis of Integrating Helmholtz Resonators into PMUTs on Ranging Performance

LIU Haojie1...2,3, TA Guifeng1,2,3, YAO Shutao1,2,3, LI Jiadong1,2,3, MIAO Bin2,3, SHANG Wenling2,3,4, FENG Changkun2,3, and TAO Jinyan2,35 |Show fewer author(s)
Author Affiliations
  • 1School of Mechanical and Electrical Engineering, Changchun University of Science and Technology, Changchun 130012, China
  • 2Suzhou Institute of Nano-Tech and Nano-Bionics(SINANO), Chinese Academy of Sciences, Suzhou 215123, China
  • 3Key Laboratory of Multifunctional Nanomaterials and Smart Systems, Chinese Academy of Sciences, Suzhou 215123, China
  • 4School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026, China
  • 5The College of Science, Shanghai University, Shanghai 200072, China
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    The piezoelectric micro-machined ultrasonic transducer (PMUT) is an important sensor in the field of ultrasonic ranging. Moreover, enhancing the ranging performance of PMUT is significant for promoting its engineering applications. This study is based on the sound absorption and amplification characteristics of the Helmholtz resonant cavity and describes the design of a cavity structure that reduces sound wave absorption at the back of the PMUT, as well as a horn structure for forward sound amplification. Experimental results show that at a distance of 2 m, the PMUT integrated with the Helmholtz resonant cavity exhibits a significant increase in ultrasonic signal amplitude, reaching 321.13 mV, which is an increase of 90.5 mV (39.2%), compared with the conventional patch film cavity structure. Furthermore, the PMUT equipped with a horn featuring Helmholtz resonance characteristics measured a signal amplitude of 540.72 mV at the same distance, representing an increase of 162.41 mV (42.9%) compared with the PMUT without the horn. These results indicate that combining the PMUT with the acoustic characteristics of the Helmholtz resonant cavity is of great significance for enhancing the application of PMUT in the field of ultrasonic ranging.

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    LIU Haojie, TA Guifeng, YAO Shutao, LI Jiadong, MIAO Bin, SHANG Wenling, FENG Changkun, TAO Jinyan. Impact Analysis of Integrating Helmholtz Resonators into PMUTs on Ranging Performance[J]. Piezoelectrics & Acoustooptics, 2025, 47(1): 113

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    Paper Information

    Received: Sep. 10, 2024

    Accepted: Apr. 17, 2025

    Published Online: Apr. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.01.019

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