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Acta Optica Sinica, Volume. 33, Issue 1, 122004(2013)

Optical Design of Hyper Numerical-Aperture Schwarzschild Projection Lithographic Lens

Hu Dawei*, Li Yanqiu, and Liu Xiaolin
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    Article index updated: Mar. 10, 2025

    The article is cited by 9 article(s) CLP online library. (Some content might be in Chinese.)
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    Hu Dawei, Li Yanqiu, Liu Xiaolin. Optical Design of Hyper Numerical-Aperture Schwarzschild Projection Lithographic Lens[J]. Acta Optica Sinica, 2013, 33(1): 122004

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Jul. 19, 2012

    Accepted: --

    Published Online: Nov. 22, 2012

    The Author Email: Dawei Hu (hudawei_bit@163.com)

    DOI:10.3788/aos201333.0122004

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology