Fig. 1. Schematics and results of the fabrication of 2D wrinkled LIPSS

Fig. 2. Relationship between laser-induced wrinkle period and pulse energies，as well as film thicknesses

Fig. 3. Morphology evolution of wrinkled LIPSS on 50 nm GST thin film upon silicon through laser processing with its repetition rate of 100 kHz，different pulse energies and scanning speeds

Fig. 4. Schematics，SEM，cross-section profile，2D Fourier transformation，and AFM images of wrinkled LIPSS on 50 nm GST thin film upon silicon under scanning speed of 0.1 mm/s and different pulse energies

Fig. 5. Change curves of the angles of wrinkle angles θ_W and LIPSS θ_LIPSS versus polarization angle θ on 50 nm GST thin film upon silicon