Optics and Precision Engineering, Volume. 33, Issue 7, 1007(2025)

High-precision attitude measurement with active aiming composite sensing for laser tracker

Zhi CHENG1,2, Dengfeng DONG1,2, Yang LI1、*, Qifan QIU1,3, Jianguo WANG1,2, Hanlin HUO1, Yunpeng HUANG1,2, and Weihu ZHOU1,2
Author Affiliations
  • 1Institute of Microelectronics, Chinese Academy of Sciences, Beijing00029, China
  • 2University of Chinese Academy of Sciences, Beijing101408, China
  • 3College of Automation Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing211106, China
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    To address the requirements of quality inspection and assembly process control in large-scale high-end equipment manufacturing, an active aiming-based attitude measurement target for laser trackers was developed. A comprehensive mathematical model for attitude measurement was established, accompanied by parameter calibration procedures and nonlinear error compensation methods. The structural composition, operational principles, coordinate system definitions, and data acquisition and preprocessing techniques of the active aiming target were systematically presented. Attitude-solving models were constructed based on constraints derived from laser beam vectors and gravitational vectors. Furthermore, a feedforward neural network was employed to compensate for nonlinear errors inherent in the model-derived attitude data. Calibration strategies for parameter matrices and neural network training were formulated and evaluated. Experimental validation, including parameter calibration and attitude measurement, was performed using the active aiming target. The results indicate that within a 15 m range, the root-mean-square deviation between the proposed target and a Leica T-MAC sensor is 0.030°, satisfying the precision requirements for typical industrial large-scale attitude measurements.

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    Zhi CHENG, Dengfeng DONG, Yang LI, Qifan QIU, Jianguo WANG, Hanlin HUO, Yunpeng HUANG, Weihu ZHOU. High-precision attitude measurement with active aiming composite sensing for laser tracker[J]. Optics and Precision Engineering, 2025, 33(7): 1007

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    Paper Information

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    Received: Feb. 4, 2025

    Accepted: --

    Published Online: Jun. 23, 2025

    The Author Email: Yang LI (liyang@ime.ac.cn)

    DOI:10.37188/OPE.20253307.1007

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