Optical Design of Fizeau Interference System with Ring Light Source

Haodong Wen; Dong Liu; Yibing Shen; Zhaorui Xu; Shaojing Peng; Jian Bai

doi:10.3788/AOS240627

Acta Optica Sinica, Volume. 44, Issue 13, 1322005(2024)

Optical Design of Fizeau Interference System with Ring Light Source

Haodong Wen^1,2,3, Dong Liu^1,2,3, Yibing Shen^1,2,3, Zhaorui Xu^1,2,3, Shaojing Peng^1,2,3, and Jian Bai^1,2,3、*

Author Affiliations

¹State Key Laboratory of Extreme Photonics and Instrumentation, Zhejiang University, Hangzhou 310058, Zhejiang , China

²College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, Zhejiang , China

³ZJU-Hangzhou Global Scientific and Technological Innovation Center, Zhejiang University, Hangzhou 311215, Zhejiang , China

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Figures & Tables(14)

Fig. 1. Structure diagram of Fizeau interference system

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Fig. 2. Schematic diagrams of the overall structure of Fizeau interference system. (a) $ϕ$ 100 mm system; (b) $ϕ$ 810 mm system

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Fig. 3. Ring light source system optical path

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Fig. 4. Fizeau interference system optical path. (a) $ϕ$ 100 mm system; (b) $ϕ$ 810 mm system

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Fig. 5. Wavefront difference of Fizeau interference system. (a) Extended collimation optical path of $ϕ$ 100 mm system; (b) total optical path of $ϕ$ 100 mm system; (c) extended collimation optical path of $ϕ$ 810 mm system; (d) total optical path of $ϕ$ 810 mm system

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Fig. 6. Interference fringe images. (a) Point source mode; (b) ring source mode

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Fig. 7. ITF of $ϕ$ 100 mm experimental system

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Fig. 8. Results after replacing the imaging lens group. (a) Theoretical wavefront difference; (b) ITF

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Fig. 9. Imaging process of step plate by interference system

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Fig. 10. $ϕ$ 100 mm system optical paths. (a) Interference path; (b) imaging path

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Fig. 11. Design results of $ϕ$ 100 mm system. (a) Wavefront difference of angle of view corresponding to ring light source; (b) wavefront difference of maximum angle of view; (c) MTF; (d) distortion

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Fig. 12. $ϕ$ 810 mm system optical paths. (a) Interference path; (b) imaging path

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Fig. 13. Design results of $ϕ$ 810 mm system. (a) Wavefront difference of angle of view corresponding to ring light source; (b) wavefront difference of maximum angle of view; (c) MTF; (d) distortion

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Table 1. Tolerance parameters of each surface of lens group

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Table 1. Tolerance parameters of each surface of lens group

Lens group type	TFRN （fringe number）	TIRR （fringe number）	TTHI /mm	TSDX /mm	TSDY /mm	TIRX /mm	TIRY /mm	TIND	TABB /%
$ϕ$ 100 mm system	3	0.2	0.03	0.01	0.01	0.01	0.01	0.0003	0.5
$ϕ$ 810 mm system	3	0.2	0.03	0.01	0.01	0.01	0.01	0.0003	0.5
Imaging lens	3	0.2	0.03	0.01	0.01	0.01	0.01	0.0003	0.5

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Haodong Wen, Dong Liu, Yibing Shen, Zhaorui Xu, Shaojing Peng, Jian Bai. Optical Design of Fizeau Interference System with Ring Light Source[J]. Acta Optica Sinica, 2024, 44(13): 1322005

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Paper Information

Category: Optical Design and Fabrication

Received: Feb. 8, 2024

Accepted: Mar. 18, 2024

Published Online: Jul. 12, 2024

The Author Email: Bai Jian (bai@zju.edu.cn)

DOI:10.3788/AOS240627

CSTR:32393.14.AOS240627

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology