INFRARED, Volume. 43, Issue 12, 20(2022)
Study on Surface Roughness Optimization of InSb Polishing Wafer
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KONG Zhong-di, ZHAO Chao, DONG Tao. Study on Surface Roughness Optimization of InSb Polishing Wafer[J]. INFRARED, 2022, 43(12): 20
Paper Information
Received: Sep. 13, 2022
Accepted: --
Published Online: Mar. 11, 2023
The Author Email: KONG Zhong-di (kongyong_1000@163.com)
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