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Opto-Electronic Engineering, Volume. 38, Issue 11, 73(2011)

Analysis of Film Thickness Uniformity for Large Aperture Coater of 3.6 m in Diameter

AI Wan-jun1,2、* and XIONG Sheng-ming1
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    AI Wan-jun, XIONG Sheng-ming. Analysis of Film Thickness Uniformity for Large Aperture Coater of 3.6 m in Diameter[J]. Opto-Electronic Engineering, 2011, 38(11): 73

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    Received: May. 27, 2011

    Accepted: --

    Published Online: Nov. 18, 2011

    The Author Email: Wan-jun AI (awj422177370@163.com)

    DOI:10.3969/j.issn.1003-501x.2011.11.014

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology