Structure and cathodoluminescence properties of Dy<sup>3+</sup> and Tb<sup>3+</sup> doped AlN films

Xuan LUO; He-chen MENG; Xiao-dan WANG; Zi-hang CHEN; Xiong-hui ZENG; Xiao-dong GAO; Shu-nan ZHENG; Hong-min MAO

doi:10.37188/CO.2023-0219

Chinese Optics, Volume. 17, Issue 4, 733(2024)

Structure and cathodoluminescence properties of Dy³⁺ and Tb³⁺ doped AlN films

Xuan LUO¹, He-chen MENG¹, Xiao-dan WANG^1、*, Zi-hang CHEN¹, Xiong-hui ZENG^2、*, Xiao-dong GAO², Shu-nan ZHENG², and Hong-min MAO¹

Author Affiliations

¹School of Physical Science and Technology, Suzhou University of Science and Technology, Suzhou 215009, China

²Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China

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Figures & Tables(9)

Fig. 1. Raman spectra of (a) S1, S2, S3 samples and (b) S4, S5, S6 samples. The inset shows the trend of E₂(high) changes with different doses of Dy³⁺

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$X-ray diffractograms of Tb3+ and Dy3+ implanted AlN films. (a) S1-S3 samples; (b) S4-S6 samples. The dashed line indicates the change in Bragg peak position$

Fig. 2. X-ray diffractograms of Tb³⁺ and Dy³⁺ implanted AlN films. (a) S1-S3 samples; (b) S4-S6 samples. The dashed line indicates the change in Bragg peak position

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Fig. 3. Cathodoluminescence (CL) spectra of AlN with different dosages of Tb³⁺ and Dy³⁺ injected. (a) S1-S3 samples; (b) S4-S6 samples. (c), (d) The variation trend of integrated intensities of Tb³⁺ emission peak (I₄₉₃) and Dy³⁺ emission peak (I₄₈₄)

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Fig. 4. Energy transfer mechanism in the Tb³⁺ and Dy³⁺

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Fig. 5. Linear fitting between I₀/I and C_p^n/3 (n = 6, 8, 10), with the best fitting result observed when n = 6

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Fig. 6. The CIE chromaticity diagram of the Tb³⁺ and Dy³⁺ co-doped AlN films

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Table 1. Ion implantation dose in AlN: Tb³⁺/Dy³⁺ samples
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Table 1. Ion implantation dose in AlN: Tb³⁺/Dy³⁺ samples
Sample Tb³⁺(at/cm²) Dy³⁺(at/cm²)
S1 5×10¹⁴ 1×10¹⁴
S2 5×10¹⁴ 5×10¹⁴
S3 5×10¹⁴ 1×10¹⁵
S4 1×10¹⁵ 1×10¹⁴
S5 1×10¹⁵ 5×10¹⁴
S6 1×10¹⁵ 1×10¹⁵

Table 2. Calculation results of average injection dose C_p and critical distance R_c

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Table 2. Calculation results of average injection dose C_p and critical distance R_c

Sample	Tb³⁺ /（at· cm⁻²）	Dy³⁺/（at· cm⁻²）	C_p/（%, atom fraction）	R_c（nm）
S1	5×10¹⁴	1×10¹⁴	0.4219	2.11448
S2	5×10¹⁴	5×10¹⁴	0.7012	1.78531
S3	5×10¹⁴	1×10¹⁵	1.0480	1.56149
S4	1×10¹⁵	1×10¹⁴	0.7708	1.72986
S5	1×10¹⁵	5×10¹⁴	1.0480	1.56149
S6	1×10¹⁵	1×10¹⁵	1.3927	1.42028

Table 3. Luminescent chromaticity coordinates and color temperature of AlN: Tb³⁺/Dy³⁺ with different doses of Tb³⁺and Dy³⁺ions

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Table 3. Luminescent chromaticity coordinates and color temperature of AlN: Tb³⁺/Dy³⁺ with different doses of Tb³⁺and Dy³⁺ions

Sample	Tb³⁺/(at·cm⁻²)	Dy³⁺/(at·cm⁻²)	CIE co-ordinates		CCT/K
Sample	Tb³⁺/(at·cm⁻²)	Dy³⁺/(at·cm⁻²)	x	y	CCT/K
S1	5×10¹⁴	1×10¹⁴	0.3446	0.3939	5119.6625
S2	5×10¹⁴	5×10¹⁴	0.3775	0.3701	4042.5739
S3	5×10¹⁴	1×10¹⁵	0.3506	0.3566	4817.7583
S4	1×10¹⁵	1×10¹⁴	0.3560	0.4158	4845.6823
S5	1×10¹⁵	5×10¹⁴	0.3685	0.3714	4310.2723
S6	1×10¹⁵	1×10¹⁵	0.3422	0.3506	5110.9489

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Xuan LUO, He-chen MENG, Xiao-dan WANG, Zi-hang CHEN, Xiong-hui ZENG, Xiao-dong GAO, Shu-nan ZHENG, Hong-min MAO. Structure and cathodoluminescence properties of Dy³⁺ and Tb³⁺ doped AlN films[J]. Chinese Optics, 2024, 17(4): 733

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Paper Information

Received: Dec. 7, 2023

Accepted: --

Published Online: Aug. 9, 2024

The Author Email:

DOI:10.37188/CO.2023-0219

Topics

Table 1. Ion implantation dose in AlN: Tb3+/Dy3+ samples

Table 1. Ion implantation dose in AlN: Tb3+/Dy3+ samples

Table 2. Calculation results of average injection dose Cp and critical distance Rc

Table 2. Calculation results of average injection dose Cp and critical distance Rc

Table 3. Luminescent chromaticity coordinates and color temperature of AlN: Tb3+/Dy3+ with different doses of Tb3+and Dy3+ions

Table 3. Luminescent chromaticity coordinates and color temperature of AlN: Tb3+/Dy3+ with different doses of Tb3+and Dy3+ions

Table 1. Ion implantation dose in AlN: Tb³⁺/Dy³⁺ samples

Table 1. Ion implantation dose in AlN: Tb³⁺/Dy³⁺ samples

Table 2. Calculation results of average injection dose C_p and critical distance R_c

Table 2. Calculation results of average injection dose C_p and critical distance R_c

Table 3. Luminescent chromaticity coordinates and color temperature of AlN: Tb³⁺/Dy³⁺ with different doses of Tb³⁺and Dy³⁺ions

Table 3. Luminescent chromaticity coordinates and color temperature of AlN: Tb³⁺/Dy³⁺ with different doses of Tb³⁺and Dy³⁺ions