Infrared and Laser Engineering, Volume. 51, Issue 5, 20220214(2022)

Fabrication of silicon nitride-based integrated microcavity optical frequency comb devices (Invited)

Zhendong Zhu1, Pingwei Lin1, Zhaoyang Sun2, Benfeng Bai2, and Xueshen Wang1
Author Affiliations
  • 1National Institute of Metrology, Beijing 100029, China
  • 2Department of Precision Instrument, Tsinghua University, Beijing 100084, China
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    Zhendong Zhu, Pingwei Lin, Zhaoyang Sun, Benfeng Bai, Xueshen Wang. Fabrication of silicon nitride-based integrated microcavity optical frequency comb devices (Invited)[J]. Infrared and Laser Engineering, 2022, 51(5): 20220214

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    Paper Information

    Category: Special issue—Microcavity optical frequency comb technology

    Received: Mar. 15, 2022

    Accepted: --

    Published Online: Jun. 14, 2022

    The Author Email:

    DOI:10.3788/IRLA20220214

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