Journal of Semiconductors, Volume. 40, Issue 10, 101302(2019)
Recent progress in epitaxial growth of III–V quantum-dot lasers on silicon substrate
Fig. 1. (Color online) Three major issues faced in monolithic III–V/Si integration: (a) APBs, (b) TDs and (c) thermal cracks.
Fig. 2. (Color online) (a) Schematic illustration of the comparative interaction of threading dislocations with QWs and QDs. (b) Cross-sectional schematic description of the mechanism of dislocation bending by QDs. (c) Bright-field scanning transmission electron microscopy (TEM) images of the TDs in the QD active region[
Fig. 3. (Color online) (a) Dark-field scanning TEM image of a Si substrate with 4° off-cut. (b) High resolution high-angle annular dark-field scanning TEM image of the 6 nm-thick AlAs nucleation layer between GaAs buffer layer and a Si substrate. (c) Bright-field scanning TEM image of DFLs. (d) Bright-field scanning TEM image of the QD active layers. (e) Photoluminescence (PL) spectrum of a QD active region grown on GaAs and Si. (f) Cross-sectional scanning emission microscopy (SEM) image of the fabricated RWG laser with as-cleaved facets. Copyright © 2016, Springer Nature. With permission of Springer (a–c). Reprinted with permission from Ref. [
Fig. 4. (Color online) (a) Measured RT CW
Fig. 5. (Color online) (a) Cutaway schematic of the DFB laser array on Si (not to scale). (b) High-resolution SEM image of the gratings with a
Fig. 6. (Color online) (a) Schematic of layer structure of QD MD laser on Si. The insets are an SEM image of a cross-section of the structure (left) and a TEM image of the QD active region (right). (b) The RT CW
Fig. 7. Bright-field scanning TEM image of on-axis Si (001) substrate.
Fig. 8. (Color online) (a) Single-facet output power versus current density for the same Si-based InAs/GaAs QD laser as a function of temperature under CW operation. The inset shows the
Fig. 9. (Color online) (a) Schematic diagram of a microdisk laser grown on planar on-axis Si (001) substrate. (b) SEM image of a fabricated microdisk laser. (c) Collected PL spectra above and below the lasing threshold of a MD with
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Shujie Pan, Victoria Cao, Mengya Liao, Ying Lu, Zizhuo Liu, Mingchu Tang, Siming Chen, Alwyn Seeds, Huiyun Liu. Recent progress in epitaxial growth of III–V quantum-dot lasers on silicon substrate[J]. Journal of Semiconductors, 2019, 40(10): 101302
Category: Reviews
Received: Jun. 29, 2019
Accepted: --
Published Online: Sep. 22, 2021
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