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Opto-Electronic Engineering, Volume. 48, Issue 7, 210047(2021)

Absolute testing of planarity and inhomogeneity with modified six-step method

Zhang Shuai1,2, Quan Haiyang1、*, Hou Xi1, Hu Xiaochuan1, and Wu Gaofeng1
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  • 1[in Chinese]
  • 2[in Chinese]
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    Zhang Shuai, Quan Haiyang, Hou Xi, Hu Xiaochuan, Wu Gaofeng. Absolute testing of planarity and inhomogeneity with modified six-step method[J]. Opto-Electronic Engineering, 2021, 48(7): 210047

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    Paper Information

    Category: Article

    Received: Feb. 4, 2021

    Accepted: --

    Published Online: Sep. 4, 2021

    The Author Email: Haiyang Quan (alsea111.1989@163.com)

    DOI:10.12086/oee.2021.210047

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology