Fig. 1. Schematic diagram of the rear surface of fused quartz processed by LIPMM in vacuum^[18]

Fig. 2. Comparison diagram of Pyrex7740 glass edges processed by LIPMM at different laser processing speeds. (a) v=20 mm/s; (b) v=200 mm/s; (c) v=1000 mm/s^[22]

Fig. 3. Schematic diagram of processing microchannels on the rear surface of glass by LIPMM combined with chemical corrosion. (a) Laser ablation on the sacrificial material surface; (b) plasma expansion; (c) removal of material; (d) micro-cracks covered by recast layer before chemical corrosion; (e) removal of recast layer and amplification of micro-cracks into micro-textures by chemical corrosion^[23]

Fig. 4. Schematic illustration of sputter coating a graphite film on glass by LIPMM. (a) An ablated micro-channelfabricated by laser-induced plasma; (b) graphite film formed by laser-induced sputter coating (LISC)^[24]

Fig. 5. Schematic diagram of front surface machined by improved LIPMM^[25]

Fig. 6. SEM images of micro-channels created on Al₂O₃ ceramic using two processes with two pulse energies.(a) DLA, 1.2 μJ; (b) DLA, 7.5 μJ; (c) LIPMM, 1.2 μJ; (d) LIPMM, 7.5 μJ^[44]

Fig. 7. Schematics of the LIPMM process^[41]

Fig. 8. Schematic of LIPMM assisted by repulsive magnetic field^[48]

Fig. 9. Schematic diagram of the microchannel. (a) A groove produced by repulsive magnetic field assisted LIPMM; (b) magnified image^[48]

Fig. 10. Optical device and plasma shape. (a) CCD image of spot plasma; (b) optical arrangement for creating line plasma; (c) CCD image of line plasma^[49]

Fig. 11. Schematic of LIPMM using flowing water layer^[51]

Fig. 12. Images of micro-channels created by F-LIPMM. (a) Surface morphology; (b) cross-sectional profile^[52]