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Chinese Journal of Lasers, Volume. 45, Issue 4, 401012(2018)

Analysis on Precision Assembly Characteristics of Prism Expander Applied to Spectrum Control

Wang Qian1,2,3, Zhao Jiangshan1,2, and Zhou Yi1,2、*
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    [1] Stamm U, Paetzel R, Kleinschmidt J et al. ArF excimer laser for 193-nm lithograph[C]. SPIE, 3334, 1010-1013(1998).

    [2] Basting D, Marowsky G. Excimer laser technology[M]. Berlin: Spring-Verlag, 182-190(2005).

    [3] Zhang H B, Lou Q H, Zhou J et al. ArF excimer laser line narrowing technique[J]. Laser & Optoelectronics Progress, 46, 46-51(2009).

    [4] Barr J R M. Achromatic prism beam expanders[J]. Optics Communications, 51, 41-46(1984). http://www.sciencedirect.com/science/article/pii/0030401884902803

    [5] Loewen E, Maystre D, Popove E et al. Diffraction efficiency of echelles working in extremely high orders[J]. Applied Optics, 35, 1700-1704(1996). http://www.opticsinfobase.org/ao/abstract.cfm?uri=ao-35-10-1700

    [6] Zhang H B, Yuan Z J, Zhou J et al. Optimal design of prism beam expander in line narrowed excimer laser cavity[J]. Chinese Journal of Lasers, 38, 1102008(2011).

    [7] Shan Y Y, Zhao J S, Li H et al. Application study on fused silica prisms in excimer laser spectrum control[J]. Chinese Journal of Lasers, 40, 0402008(2013).

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    Wang Qian, Zhao Jiangshan, Zhou Yi. Analysis on Precision Assembly Characteristics of Prism Expander Applied to Spectrum Control[J]. Chinese Journal of Lasers, 2018, 45(4): 401012

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    Paper Information

    Category: laser devices and laser physics

    Received: Sep. 30, 2017

    Accepted: --

    Published Online: Apr. 13, 2018

    The Author Email: Yi Zhou (zhouyi@aoe.ac.cn)

    DOI:10.3788/CJL201845.0401012

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology