Chinese Journal of Quantum Electronics, Volume. 21, Issue 1, 83(2004)

Quantum Confinement Analysis of Nanostructure in oxidation of SiGe alloys

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    References(8)

    [1] [1] Kang S K;Ko D H. Wet oxidation behaviors of polycrystalline SiGe films [J]. J. Vac. Sci. Technol. A;2001;19(4): 1617

    [2] [2] Tetelin C;Wallart X;Nys J P. Kinetics and mechanism of low temperature atomicoxygen-assisted oxidation of SiGe layers [J]. J. Appl. Phys.;1998;83(5): 2842

    [3] [3] Madsen J M;Cui Zhenjiang;Takoudis C G. Low temperature oxidation of SiGe in ozone: ultrathin oxdes [J]. J.Appl. Phys.;2000;87(4): 2046

    [4] [4] Huang W;et al. Kinetics and mechanism of nanostructure in oxidation of SiGe alloys[J]. Chin. Phys. Lett.;2002;19(11): 1734

    [5] [5] Hellberg P E;Zhang S L;dHeurle F M;et al. Oxidetion of SiGe alloys. I. An experimental study [J]. J. Appl.Phys.;1997;82(11): 5773

    [6] [6] Huang Weiqi;et al. Effect of the transient response in SiGe parallelizing PNjunction [J]. J. Mater. Sci. Technol.;1999;15(4): (SCI)

    [7] [7] Huang Weiqi;et al. Research on nonlinear of semiconductor photovoltatic effect[J]. Chinese Journal of Scientific Instrument;1999;20(3)

    [9] [9] Cai Shaohong;et al. Critical similar theory of generalized phase transition andits universality [J]. Chinese Physics;2000;9(6)

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    [in Chinese], [in Chinese], [in Chinese]. Quantum Confinement Analysis of Nanostructure in oxidation of SiGe alloys[J]. Chinese Journal of Quantum Electronics, 2004, 21(1): 83

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    Paper Information

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    Received: May. 15, 2003

    Accepted: --

    Published Online: May. 15, 2006

    The Author Email: (wqhuang2001@yahoo.com)

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