Chinese Optics Letters, Volume. 11, Issue s1, S10606(2013)

Multilayers with high-reflectivity at 19.5 nm and low-reflectivity at 30.4 nm

Li Jiang, Jingtao Zhu, Zhong Zhang, Zhanshan Wang, Michael Trubetskov, and Alexander V. Tikhonravov
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Li Jiang, Jingtao Zhu, Zhong Zhang, Zhanshan Wang, Michael Trubetskov, Alexander V. Tikhonravov, "Multilayers with high-reflectivity at 19.5 nm and low-reflectivity at 30.4 nm," Chin. Opt. Lett. 11, S10606 (2013)

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Paper Information

Category: Duv/euv coatings

Received: Dec. 6, 2012

Accepted: Dec. 26, 2012

Published Online: Jun. 10, 2013

The Author Email:

DOI:10.3788/col201311.s10606

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