Chinese Journal of Lasers, Volume. 35, Issue 3, 436(2008)
Process Investigation of a-Si:H Thin Films Prepared by Direct Current Magnetron Sputtering and Application on Diode Laser Cavity Coatings
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Liu Chunling, Yao Yanping, Wang Chunwu, Wang Yuxia, Bo Baoxue. Process Investigation of a-Si:H Thin Films Prepared by Direct Current Magnetron Sputtering and Application on Diode Laser Cavity Coatings[J]. Chinese Journal of Lasers, 2008, 35(3): 436
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