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Journal of Synthetic Crystals, Volume. 50, Issue 3, 558(2021)

Precision Cutting Mechanism of Monocrystalline Silicon Based on Single Abrasive Micro-Scratch

WANG Long1, WANG Liuying1, LIU Gu1, TANG Xiujian2, YANG Nengjun1, YOU Yinfeng3, and LIU Guohao4
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    WANG Long, WANG Liuying, LIU Gu, TANG Xiujian, YANG Nengjun, YOU Yinfeng, LIU Guohao. Precision Cutting Mechanism of Monocrystalline Silicon Based on Single Abrasive Micro-Scratch[J]. Journal of Synthetic Crystals, 2021, 50(3): 558

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    Received: Dec. 14, 2020

    Accepted: --

    Published Online: Apr. 15, 2021

    The Author Email:

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology