[1] [1] LING Jie, CHEN Long, FENG Zhao,et al. Development and test of a high speed pusher-type inchworm piezoelectric actuator with asymmetric driving and clamping configuration[J]. Mechanism and Machine Theory, 2022, 176(11): 94-114.

[3] [3] SHAO Shubao, SONG Siyang, SHAO Yan,et al.Long-range piezoelectric actuator with large load capacity using inchworm and stick-slip driving principles[J].Precision Engineering, 2022,75(13):167-179.

[6] [6] WU Yajun, LIU Wenqing, CHEN Jinxin, et al.A novel PWM signal-generation strategy for pockels cell drivers[J]. Photonics, 2023,6(11):168-178.

[8] [8] XU Yu, CHEN Wei, LIANG Hao, et al. High voltage pulse generator suitable for capacitive load[J].AIP Advances, 2017,7(10):115-125.

[9] [9] WANG Lijun, ZHAO Jiwen, YANG Xing, et al. Robust deadbeat predictive current regulation for permanent magnet synchronous linear motor drivers with parallel parameter disturbance and load observer[J]. IEEE Transactions on Power Electronics, 2022,37(12):7834-7845.

[11] [11] JIANG Weihua. Review of solid-state linear transformer driver technology[J]. Matter and Radiation at Extremes, 2018, 56(8):13-21.

[12] [12] XIAO D X, NALAKATH S, FILHO S R, et al.Full-speed sensorless control scheme for interior permanent magnet synchronous motors[J]. IEEE Transactions on Power Electronics,2021,36 (11):4723-4737.