Piezoelectrics & Acoustooptics, Volume. 46, Issue 4, 562(2024)
Development of Dual-Mode Driver for Inchworm Piezoelectric Ceramic Motor
Inchworm piezoelectric ceramic motors (IWPECMs), known for their small size, long stroke, nanopositioning,and large thrust characteristics, are widely used in integrated circuit equipment and precision motion platforms. However, current IWPECMs struggle to achieve high-precision positioning and controllable displacement and velocity over long-stroke movements with existing drivers. As a result, they cannot be applied to 7 nm technology integrated circuit (IC) chip testing equipment that requires high speed and nano-positioning. To address these issues, a dual-mode driver is proposed and developed. This dual-mode driver includes displacement-voltage and velocity- frequency modes, which are based on the principles of charge and stress effects, respectively. The sliding mode control (SMC) method is used to reduce the voltage ripple when the dual-mode driver outputs high voltage, thereby improving the displacement resolution of the IWPECM. Finally, the hardware performance and dual-mode control of the driver were verified through experiments, further testing the performance of IWPECM.
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HAN Shuo, YANG Xiaofeng. Development of Dual-Mode Driver for Inchworm Piezoelectric Ceramic Motor[J]. Piezoelectrics & Acoustooptics, 2024, 46(4): 562
Received: Apr. 6, 2024
Accepted: --
Published Online: Sep. 18, 2024
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