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Microelectronics, Volume. 55, Issue 4, 678(2025)

Research on Laser Grooving Process and Reliability of Low-K Chips

JI Yong, YANG Kun, LI Yang, LI Xinxin, and JIAO Honghao
Author Affiliations
  • Wuxi Zhongwei High-etch Electronics Co, Ltd, Wuxi, Jiangsu 214035, P R China
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    JI Yong, YANG Kun, LI Yang, LI Xinxin, JIAO Honghao. Research on Laser Grooving Process and Reliability of Low-K Chips[J]. Microelectronics, 2025, 55(4): 678

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    Paper Information

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    Received: May. 14, 2025

    Accepted: Sep. 9, 2025

    Published Online: Sep. 9, 2025

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.250183

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology