Interferometer and Nanometer Positioning Integration System Used for Drift Reduction

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Chinese Journal of Lasers, Volume. 29, Issue 8, 707(2002)

[in Chinese]^1、*, [in Chinese]¹, [in Chinese]¹, and [in Chinese]²

Author Affiliations

¹[in Chinese]

²[in Chinese]

show less

Abstract Get PDF(in Chinese)

References(5)

[1] [1] Charles R. Steinmetz. Displacement measurement repeatibility in tens of nanometers with laser interferometry [C]. SPIE, 1988, 921:406～420

[2] [2] J. K. Schaller, R. Czepluch, C. G. Stojanoff. Plasmon spectroscopy for high resolution angular measurements [C]. SPIE, 1997, 3098:476～486

[3] [3] G. Margheri, A. Mannoni, F. Quercioli. A new high-resolution displacement sensor based on surface plasmon resonance [C]. SPIE, 1996, 2783:211～220

[4] [4] S. G. Nelson, K. S. Johnston, S. S. Yee. High sensitivity surface plasmon resonance sensor based on phase detection [J]. Sensors and Actuators B, 1996, 35～36:187～191

[6] [6] Zhaoming Zhu. Study on High-Resolution Angle Measurement Using Surface Plasmon Resonance Technique [M]. Master Dissertation to Tsinghua University, 1998 (in Chinese)

CLP Journals

[1] Li Liyan, Wang Jian, Han Chunyang, Yuan Yonggui, Wu Bing, Yang Jun, Yuan Libo. Integration Single-Frequency Laser Interferometer Used to Nanometer Measurement[J]. Chinese Journal of Lasers, 2011, 38(4): 408001

Tools

Get Citation

Copy Citation Text

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Interferometer and Nanometer Positioning Integration System Used for Drift Reduction[J]. Chinese Journal of Lasers, 2002, 29(8): 707

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category:

Received: May. 15, 2001

Accepted: --

Published Online: Aug. 8, 2006

The Author Email: (spwsensor@sina.com)

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology