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Acta Optica Sinica, Volume. 37, Issue 6, 612003(2017)

Damage Inspection of Optical Surface Based on Galvanometer Scanning

Guo Yajing*, Tang Shunxing, Jiang Xiuqing, Zhu Baoqiang, and Lin Zunqi
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    Guo Yajing, Tang Shunxing, Jiang Xiuqing, Zhu Baoqiang, Lin Zunqi. Damage Inspection of Optical Surface Based on Galvanometer Scanning[J]. Acta Optica Sinica, 2017, 37(6): 612003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 12, 2016

    Accepted: --

    Published Online: Jun. 8, 2017

    The Author Email: Yajing Guo (guoyajing860501@163.com)

    DOI:10.3788/aos201737.0612003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology