Fig. 1. Flowchart of plasma disinfection

Fig. 2. 9×9 array plasma generator

Fig. 3. Distribution and size of jet channels

Fig. 4. Spore suspension of Bacillus subtilis

Fig. 5. Spores on AGAR plate was treated by plasma jet

Fig. 6. Voltage and current waveform (a) and single pulse energy (b) of pulsed plasma jet

Fig. 7. Emission spectra of plasma jets with different gas compositions

Fig. 8. Array jet discharge

Fig. 9. Sterilizing effect of jet under different voltage

Fig. 10. Sterilizing effect of jet at different pulse frequencies

Fig. 11. Sterilizing effect of jet under different treatment time

Fig. 12. Sterilization effect of jet under different gas atmosphere

Fig. 13. Sterilization data of jet under different gas atmosphere

Fig. 14. SEM images of Bacillus subtilis spores before and after treatment