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Chinese Journal of Lasers, Volume. 49, Issue 16, 1602001(2022)

Mechanism and Experimental Research of Magnetic Field Rotation Assisted Laser Machining of Micro-Holes

Yinfei Wang, Hao Zhu, Zhaoyang Zhang*, Tianshuai Zhang, Yucheng Wu, and Wenwu Du
Author Affiliations
  • School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, Jiangsu, China
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    Figures&Tables (13)
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    Figures & Tables(13)
    Schematic of magnetic field rotation assisted laser processing system

    Fig. 1. Schematic of magnetic field rotation assisted laser processing system

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    Schematic of experimental setup

    Fig. 2. Schematic of experimental setup

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    Schematics of micro-hole diameter measurement and taper calculation. (a) Hole diameter measurement; (b) hole taper calculation

    Fig. 3. Schematics of micro-hole diameter measurement and taper calculation. (a) Hole diameter measurement; (b) hole taper calculation

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    Schematics of experimental processing. (a) Laser direct processing; (b) magnetic field rotation assisted laser processing

    Fig. 4. Schematics of experimental processing. (a) Laser direct processing; (b) magnetic field rotation assisted laser processing

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    SEM images of micro-hole inner walls under different processing methods. (a) Laser direct processing; (b) static magnetic field assisted processing; (c) magnetic field rotation (speed of 50 r/min) assisted processing; (d) magnetic field rotation (speed of 150 r/min) assisted processing; (e) magnetic field rotation (speed of 250 r/min) assisted processing

    Fig. 5. SEM images of micro-hole inner walls under different processing methods. (a) Laser direct processing; (b) static magnetic field assisted processing; (c) magnetic field rotation (speed of 50 r/min) assisted processing; (d) magnetic field rotation (speed of 150 r/min) assisted processing; (e) magnetic field rotation (speed of 250 r/min) assisted processing

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    SEM images of splashing at micro-hole entrance under different processing methods. (a) Laser direct processing; (b) magnetic field rotation (speed of 50 r/min) assisted processing; (c) magnetic field rotation (speed of 150 r/min) assisted processing; (d) magnetic field rotation (speed of 250 r/min) assisted processing

    Fig. 6. SEM images of splashing at micro-hole entrance under different processing methods. (a) Laser direct processing; (b) magnetic field rotation (speed of 50 r/min) assisted processing; (c) magnetic field rotation (speed of 150 r/min) assisted processing; (d) magnetic field rotation (speed of 250 r/min) assisted processing

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    Energy spectra of micro-hole inner walls under different processing methods. (a) Laser direct processing; (b) magnetic field rotation (speed of 50 r/min) assisted processing; (c) magnetic field rotation (speed of 150 r/min) assisted processing; (d) magnetic field rotation (speed of 250 r/min) assisted processing

    Fig. 7. Energy spectra of micro-hole inner walls under different processing methods. (a) Laser direct processing; (b) magnetic field rotation (speed of 50 r/min) assisted processing; (c) magnetic field rotation (speed of 150 r/min) assisted processing; (d) magnetic field rotation (speed of 250 r/min) assisted processing

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    Ultra-depth-of-field microscope images of micro-hole after processing for 5 s. (a) Laser direct processing; (b) magnetic field rotation (speed of 50 r/min) assisted processing; (c) magnetic field rotation (speed of 150 r/min) assisted processing; (d) magnetic field rotation (speed of 250 r/min) assisted processing; (e) magnetic field rotation (speed of 350 r/min) assisted processing

    Fig. 8. Ultra-depth-of-field microscope images of micro-hole after processing for 5 s. (a) Laser direct processing; (b) magnetic field rotation (speed of 50 r/min) assisted processing; (c) magnetic field rotation (speed of 150 r/min) assisted processing; (d) magnetic field rotation (speed of 250 r/min) assisted processing; (e) magnetic field rotation (speed of 350 r/min) assisted processing

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    Ultra-depth-of-field microscope images of micro-hole after processing for 10 s. (a) Laser direct processing; (b) magnetic field rotation (speed of 50 r/min) assisted processing; (c) magnetic field rotation (speed of 150 r/min) assisted processing; (d) magnetic field rotation (speed of 250 r/min) assisted processing; (e) magnetic field rotation (speed of 350 r/min) assisted processing

    Fig. 9. Ultra-depth-of-field microscope images of micro-hole after processing for 10 s. (a) Laser direct processing; (b) magnetic field rotation (speed of 50 r/min) assisted processing; (c) magnetic field rotation (speed of 150 r/min) assisted processing; (d) magnetic field rotation (speed of 250 r/min) assisted processing; (e) magnetic field rotation (speed of 350 r/min) assisted processing

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    Micro-hole etching depth versus magnetic field rotation speed under different processing time

    Fig. 10. Micro-hole etching depth versus magnetic field rotation speed under different processing time

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    SEM images of micro-hole cross-sections, inlets and outlets under different single pulse energies. (a) Micro-hole cross-section; (b) micro-hole inlet; (c) micro-hole outlet

    Fig. 11. SEM images of micro-hole cross-sections, inlets and outlets under different single pulse energies. (a) Micro-hole cross-section; (b) micro-hole inlet; (c) micro-hole outlet

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    Comparison of micro-hole tapers under different processing techniques

    Fig. 12. Comparison of micro-hole tapers under different processing techniques

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    • Table 1. Oxygen element content measured by line scan of inner wall

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      Table 1. Oxygen element content measured by line scan of inner wall

      Magnetic fieldMass fraction of oxygen element %
      No magnetic field12.76
      Rotating magnetic field with speed of 50 r/min6.94
      Rotating magnetic field with speed of 150 r/min6.32
      Rotating magnetic field with speed of 250 r/min5.95
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    Yinfei Wang, Hao Zhu, Zhaoyang Zhang, Tianshuai Zhang, Yucheng Wu, Wenwu Du. Mechanism and Experimental Research of Magnetic Field Rotation Assisted Laser Machining of Micro-Holes[J]. Chinese Journal of Lasers, 2022, 49(16): 1602001

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    Paper Information

    Category: laser manufacturing

    Received: Jul. 5, 2021

    Accepted: Nov. 12, 2021

    Published Online: Jul. 28, 2022

    The Author Email: Zhang Zhaoyang (zzhaoyang@126.com)

    DOI:10.3788/CJL202249.1602001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology