Fig. 1. Block diagram of the system design

Fig. 2. Flowchart for BMP file generation

Fig. 3. Raw data of frame 19 of discharge sequence number #114816 displayed in detector acquisition software in two modes(a) Two-dimensional image spectrogram, (b) Three-dimensional spectral distribution (color online)

Fig. 4. Photos of system experimental platform (a) EUV image acquisition system, (b) FPGA simulation platform

Fig. 5. Simulation sequence diagram

Fig. 6. Comparison chart of EUV spectral image processing effect (discharge sequence #114816, #114832) Before #114816 (a) and after #114816 (b) image processing, Before #114832 (c) and after #114832 (d) image processing

Fig. 7. Spectra diagram of channel 3, 4 and 5 in frame #19 of discharge sequence number #114816(a) Channel 3, (b) Channel 4, (c) Channel 5

Fig. 8. Comparison of spectra of channel 4 before and after processing in frame 19 of discharge sequence number #114816

Fig. 9. Spectra diagram of channel 4, 5 and 6 in frame 9 of discharge sequence number#114832(a) Channel 4, (b) Channel 5, (c) Channel 6

Fig. 10. Comparison of spectra of channel 5 before and after processing in frame 9 of discharge sequence number #114832

Fig. 11. Comparison of original spectral, added noise spectral, and processed spectral are compared(a) First spectral, (b) Second spectral