Journal of Synthetic Crystals, Volume. 50, Issue 6, 987(2021)

Design and Research on Descended Heat Shield of the Single Crystal Furnace

ZHANG Xiya1、*, GAO Dedong1, WANG Shan1, PENG Xin1, LIN Guangwei1, and GAO Junwei2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(4)

    [8] [8] HUANG L Y, LEE P C, HSIEH C K, et al. On the hot-zone design of Czochralski silicon growth for photovoltaic applications[J]. Journal of Crystal Growth, 2004, 261(4): 433-443.

    [14] [14] CAO J W, GAO Y, CHEN Y, et al. Simulation aided hot zone design for faster growth of Cz silicon mono crystals[J]. Rare Metals, 2011, 30(2): 155-159.

    [15] [15] SMIRNOVA O V, DURNEV N V, SHANDRAKOVA K E, et al. Optimization of furnace design and growth parameters for Si Cz growth, using numerical simulation[J]. Journal of Crystal Growth, 2008, 310(7/8/9): 2185-2191.

    [16] [16] ZHAI J P, JIANG J W, LIU K G, et al. Study on the performance of alumina, zirconia and molybdenum composite insulation system for sapphire single crystal furnace[J]. IOP Conference Series: Materials Science and Engineering, 2018, 397: 012057.

    CLP Journals

    [1] HUANG Ming, WANG Wei. Influence of Fit Parameters on Driving System of Single Crystal Furnace[J]. Journal of Synthetic Crystals, 2022, 51(4): 594

    [2] RUI Yang, WANG Zhongbao, SHENG Wang, NI Haoran, XIONG Huan, ZOU Qipeng, CHEN Weinan, HUANG Liuqing, LUO Xuetao. Effect of Heat Shield Structure on the Distribution of Oxygen Content in 200 mm Semiconductor-Grade Czochralski Monocrystalline Silicon[J]. Journal of Synthetic Crystals, 2023, 52(6): 1110

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    ZHANG Xiya, GAO Dedong, WANG Shan, PENG Xin, LIN Guangwei, GAO Junwei. Design and Research on Descended Heat Shield of the Single Crystal Furnace[J]. Journal of Synthetic Crystals, 2021, 50(6): 987

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    Paper Information

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    Received: Apr. 8, 2021

    Accepted: --

    Published Online: Aug. 23, 2021

    The Author Email: ZHANG Xiya (527876972@qq.com)

    DOI:

    CSTR:32186.14.

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